Semiconductor Industry

Serving OEM semiconductor industry over the world we at Scrollpumps provide the semiconductor industry with.

Reliable, efficient, low service cost and compact sized dry vacuum pumps which are used as a fore pump to turbo molecular pumps.

We serve new processes and existing processes in this field.

Semiconductor Applications:

  • Chemical vapor deposition
  • Diffusion
  • Etching
  • Ion implantation
  • Lithography
  • Metrology
  • Physical vapor deposition

Our recommendation

SVF dry vacuum pumps are also used in processes for handling of gases that require the highest level of purity within the gas recovery process which is important in Semiconductor processes.
We recommend using the SVF-100 dry vacuum pump or SVF-300 for such applications.


Semiconductor industrie vacuumapplications